Linear Electric Motor Actuator

Component

Functions

Typical Configuration

Linear motor stator

Generates electromagnetic field

Permanent magnet array (with iron core) or winding track (without iron core)

Linear motor rotor

Output linear thrust

With moving parts including coils (directly connected to load)

High precision guide

Load-bearing

Air bearings (nanometer level), ball guides (industrial grade)

Position feedback system

Real time closed-loop control

Grating ruler (± 0.1 μ m) and magnetic grating ruler (± 1 μ m)

Cooling System

Cooling Management

Natural Cooling (<500W), Water Cooling (High Power)

Controller

Controller motion

Dedicated servo drive (supports EtherCAT/CANopen

Device type

Core driving mode

Transmission characteristics

Typical application scenarios

Linear Electric Motor Actuator

Direct Drive of Linear Motor

No Mechanical Transmission, Direct Output of Linear Motion

High Precision Positioning (such as Semiconductor Equipment)

Linear Electric Actuator

Rotary Motor+Mechanical Transmission (Screw, etc.)

Rotary Motion → Linear Motion Conversion

General Industrial Automation (such as Valve Control)

Linear Motor

Refers only to the linear motor body

Requires additional guidance/control system

Integrated as a core component into the equipment|

1

High precision and high response

Without mechanical transmission clearance and elastic deformation, the positioning accuracy can reach ± 1 μ m level, and the dynamic response speed is 10-100 times faster than traditional actuators, suitable for 2high-frequency and high-precision actions (such as laser cutting and chip detection).

Efficient and Low Loss

By eliminating transmission components such as gears and screws, the energy conversion efficiency can reach over 90% (traditional actuators usually have 60% -80%), and there is no mechanical wear, resulting in a longer lifespan.

3

High thrust and high speed

The thrust can range from a few newtons to tens of thousands of newtons (achieved through multi-stage stator splicing), and the speed can reach 5-10m/s, far exceeding that of screw driven actuators (usually<1m/s).

4

Compact structure

There is no need to accommodate space for rotating motors and transmission mechanisms, especially in long-distance scenarios such as large logistics sorting lines, making the layout more flexible.

No.

Industry

Core requirements

Typical Applications

1

Semiconductor and Microelectronics Manufacturing

Nano level positioning accuracy, high-speed start stop, and pollution-free environment.

Wafer handling and inspection: In lithography machines and ion implantation machines, the wafer worktable is driven to achieve precise positioning at the micrometer or even nanometer level, ensuring precise exposure of chip circuit patterns.

Chip packaging: Control the linear motion of the soldering head or probe station to complete high-precision operations such as wire bonding and chip testing.

2

Precision machine tools and processing equipment

High dynamic response, micrometer level positioning, and stable cutting force output.

High speed milling/grinding machine: Drive the worktable directly to achieve linear feed, avoiding the gap error of traditional screw transmission, and improving the surface smoothness and shape accuracy of machining (such as mold processing).

Laser processing equipment: controls the linear motion of the laser head to achieve high-speed and high-precision cutting, engraving, or marking on materials such as metal and glass.

3

Medical Devices and Life Sciences

Low vibration, high stability, and precise control of small displacements.

Medical imaging equipment: In CT and magnetic resonance imaging (MRI), the detector or bed is driven to perform smooth linear scanning to ensure imaging clarity.

Surgical robot: controls the linear advancement of surgical instruments (such as laparoscopic instruments) to achieve millimeter level operations and reduce surgical trauma.

Laboratory automation: Drive pipettes, sample racks, etc. to achieve precise pipetting and localization for high-throughput drug screening or gene sequencing.

4

Rail Transit and Transportation System

High thrust, high-speed operation, and long stroke stability.

Maglev train: It uses the electromagnetic thrust of a linear motor to directly drive the train to move in a straight line along the track, without the need for wheel rail contact, achieving high-speed (above 500km/h) and low-noise operation.

High speed conveyor line: In airport luggage sorting and logistics warehousing, it drives sorting carts or conveyor belts to achieve high-speed and accurate cargo transfer (such as automated sorting systems in e-commerce warehouses).

5

Automation and Industrial Robots

Fast response, multi axis collaboration, high repeatability positioning accuracy.

Surface mount robot: In SMT (Surface Mount Technology) production lines, it drives the nozzle module to move quickly and accurately mount electronic components onto PCB boards.

Coordinate robot: In the 3C industry (mobile phone, computer manufacturing), it realizes the handling, assembly or inspection of components, and cooperates with vision systems to complete high-precision operations.

6

Aerospace and Defense

Extreme environmental adaptability, high reliability, high-precision servo control.

Wind tunnel test: Drive the model aircraft to perform linear reciprocating motion in a wind tunnel, simulating the aerodynamic characteristics at different speeds.

Radar and satellite antenna: Control the linear displacement of the antenna feed source to achieve precise beam pointing and tracking.

Weapon system: In shipborne or vehicle mounted weapons, it drives the pitch/translation of the gun barrel or launcher to achieve rapid aiming.

7

New Energy and Precision Testing

Low interference, high resolution, and continuous stable operation.

Solar panel production: Drive the cutting head of the laser cutting machine to draw high-precision grid lines on the silicon wafer, improving the battery conversion efficiency. Precision measuring instruments: In coordinate measuring machines and laser interferometers, the driving probe achieves ultra precision detection of workpiece dimensions (with an accuracy of up to 0.1 μ m).