Hollow Rotary Semiconductor Table

Hollow Rotary Semiconductor Table

Details
Hollow Rotary Semiconductor Table is a high-precision rotary positioning device designed specifically for semiconductor manufacturing scenarios. Its core value lies in solving micro level positioning, clean protection, and process pipeline integration problems in wafer processing and chip packaging through "ultra clean hollow structure+semiconductor process adaptation design".
Category
Hollow Rotary Stages
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Description
Technical Parameters

Hollow Rotary Semiconductor Table is a high-precision rotary positioning device designed specifically for semiconductor manufacturing scenarios.

 

Hollow Rotary Semiconductor Table integrates the top-level technical indicators of the hollow rotating platform and has been specially optimized for the extreme requirements of the semiconductor industry. 

 

Here In this page, we introduce series of Hollow Rotary Semiconductor Table TMN130,

you will see data sheet, production pictures,videos of test as follows:
Also You are welcome to watch more projects or visit our video gallery by Youtube: https://www.youtube.com/@tallmanrobotics

product-971-777

 

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Reliability Test
Concentricity and Level Test
Precision and Flatness test
Accuracy and Flatness test

 

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FAQ: 

1. What are the common sizes of the hollow aperture of the hollow rotary tables?

    Common aperture specifications: The hollow aperture of mainstream hollow rotating platforms ranges from 10mm to 600mm, with specific models such as 28mm, 33mm, 62mm, 100mm, 150mm, and larger aperture models reaching over 600mm


2. What is the impact of the size of the hollow aperture on the performance of hollow rotary tables?

    The impact of aperture on performance: The larger the aperture, the weaker the platform rigidity. An excessively large aperture can lead to insufficient wall thickness and uneven stress, thereby reducing load-bearing capacity and bending and torsional performance, affecting operational accuracy and stability. Strictly control the ratio of aperture to wall thickness during design.


3. What is the material of the inner wall of the hollow structure and is it wear-resistant?

    Inner wall material and wear resistance: The inner wall material is consistent with the platform body, commonly using aluminum alloy, cast iron, alloy steel, etc. The inner wall generally does not directly bear high-frequency friction, but if it is necessary to thread cables or ventilation pipes, surface hardening, anodizing and other treatments can be used to improve wear resistance and corrosion resistance.


4. Does the hollow structure support threading, tubing, or ventilation functions?

    Functional support: The hollow structure fully supports threading, piping, and ventilation. Cables, air pipes, optical fibers, coolant pipes, and laser beams can all pass through the hollow holes, effectively solving the problem of pipeline entanglement during rotational motion.


5. How to ensure the structural strength of large aperture hollow rotary tables?

    Measures to ensure the strength of large aperture structures: ① Use high-strength alloy steel or cast iron materials, ② Use high-precision cross roller bearings to enhance rigidity, ③ Strictly control the ratio of aperture to wall thickness, ④ Optimize the layout of reinforcement bars for stress, ⑤ Standardize assembly processes and avoid overloading and deviation during transportation

 

 

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